Optical measurement of a micro coriolis mass flow sensor

摘要

Haneveld [1,2] demonstrated a micro Coriolis mass flow sensor, operating in theudmeasurement range of 0 to 1 g/hr achieving a resolution in the order of 10 mg/hrudusing a laser vibrometer. Equipped with an integrated capacitive [3] readout theudmeasurement uncertainty amounted to 2% of the full scale range. We demonstrate auddown-scalable and low-cost optical sensor system that measures the movement of the micro Coriolis mass flow tube with a high resolution. The noise level is measured to be 6 mg/hr at a 3s confidence interval.