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Squeeze-film damper design with air channels: Experimental verification

机译:带空气通道的挤压膜阻尼器设计:实验验证

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摘要

The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping coefficients were measured at different gaps in conventional parallel-plates MEMS and in parallel-plates with air channels. The inertial masses of the fabricated structures were pulled-in and released. From the return to rest position trajectory, the damping coefficients, at each point, were extracted. Results show a significant damping decrease in parallel-plates with air channels without visible reduction in the capacitance value.
机译:本文报道了阻尼改善的平行板几何形状的实验评估。开发了一种改进的带有空气通道的阻尼器几何形状,以解决矛盾的设计约束:对于较大的读出电容以及减小的阻尼系数而言,需要较大的感应平行板面积。在常规平行板MEMS和带有空气通道的平行板中,在不同间隙处测量阻尼系数。将制造结构的惯性质量拉入并释放。从返回到静止位置的轨迹,提取每个点的阻尼系数。结果表明,带有空气通道的平行板的阻尼显着降低,而电容值没有明显降低。

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