The traveling-wave ultrasonic motor (TWUM) drive offers many distinct advantages but suffers from severe system nonlinearities and parameter variations, especially during speed control. This paper presents a new speed tracking control system for the TWUM drive, which newly incorporates neuro-fuzzy control and direct pulsewidth modulation to solve the problem of nonlinearities and variations. The proposed control system is digitally implemented by a low-cost digital-signal-processor-based microcontroller, hence reducing the system hardware size and cost. Experimental results confirm that the proposed speed tracking controller can offer good steady-state and transient performance.
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