Bifocal and negative microlens arrays in hard optical materials

摘要

Using the methods of photoresist reflow and moulding, bifocal and negative microlens arrays, with diameters down to 10 μm, have been fabricated in GaN-on-sapphire. The optical properties of these microlens arrays were characterised by a recently developed reflection/transmission confocal microscopy technique and agree well with calculated values.