The microlens arrays in type-IIa natural single-crystal diamond were fabricated using the method of photoresist reflow and inductively coupled plasma etching. A laser scanning reflection/transmission confocal microscopy technique has been developed to characterize the optical properties of diamond microlens arrays. It was found that the technique enabled the surface profile of the microlenses to be measured simultaneously with optical parameters including focal length and spot size. The results show that the type-IIa single-crystal diamond microlenses will enable applications in photonics and optoelectronics.
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