Optical properties of diffused AlGaAs/GaAs multiple quantum wells and their applications in high power laser

摘要

We will present results for an Al0.24Ga0.76As/GaAs diffused multiple quantum well with five periods of 100/100Å thick welVbarrier layers grown in between Al0.24Ga0.76As guiding layers and cladded on top by a 1µm thick p-Al0.44Ga0.56As layer and on the bottom by an n-Al0.44Ga0.56As layer of equal thickness, on a n+-GaAs buffer layer and n+-GaAs substrate. Vacancy enhanced QW diffusion is employed where a 2000Å thick layer of Si02 is deposited on top of the diffused multiple quantum well structure. Photoluminescence measurement and photovoltage measurement at room temperature show that after rapid thermal annealing for 30 sec at 1000 °C to 1040 °C, a bandgap shift of 30 nm is obtained for the exciton edge. Further, this technique is applied to a ridge waveguide laser structure to make two windows for high power output up to 36 mW. This device shows that the diffusion process may have practical applications.