Multilayer passive RF microfabrication using jet-printed Au nanoparticle ink and aerosol-deposited dielectric

摘要

We report a bi-material additive microfabrication technique combining inkjet-printed gold films and an aerosol-deposited dielectric enamel for the realization of multilayer microsystems. Hexanethiol-encapsulated gold nanoparticle ink enables metal deposition at atmospheric pressure with a maximum temperature of 200°C. Dielectric patterning is achieved via shadow mask. Process utility is demonstrated for passive radio frequency components through the realization of spiral inductors and resonant parallel L-C tanks. The resulting device parameters agree well with theory, and the resonators exhibited a Q of 60 at 596MHz, the highest quality factor of an as-printed ink-jet microfabricated gold resonant structure to date. © 2013 IEEE.