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>A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches
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A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches
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机译:一种简单的电气测试方法,用于隔离电容式微机电开关中的粘弹性和蠕变
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摘要
A bipolar hold-down voltage was used to study mechanical degradation in radio-frequency microelectromechanical capacitive shunt switches. The bipolar signal was used to prevent the occurrence of dielectric charging and to isolate mechanical effects. The characteristics of material stress relaxation and recovery were monitored by recording the change of the pull-in voltage of a device. The creep effect in movable components was saturated by repeated actuation to the pulled-in position, while comparison with a theoretical model confirmed the presence of linear viscoelasticity in the devices. (C) 2014 AIP Publishing LLC.
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