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Opportunities of CMOS-MEMS integration through LSI foundry and open facility

机译：通过LSI代工厂和开放工厂进行CMOS-MEMS集成的机会

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International audience

机译：国际观众

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Mita Yoshio; Lebrasseur Eric; Okamoto Yuki; Marty Frédéric; Setoguchi R.; Yamada Kenshiro; Mori Isao; Morishita Satoshi; Imai Y.; Hosaka K; Hirakawa A.; Manasori Kubota; Denoual Matthieu;
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年度 2017
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正文语种 eng
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机译：通过LSI代工厂和开放工厂进行CMOS-MEMS集成的机会
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7. Opportunities of CMOS-MEMS integration through LSI foundry and open facility [O] . Mita Yoshio, Lebrasseur Eric, Okamoto Yuki, 2017

机译：通过LSI代工厂和开放工厂进行CMOS-MEMS集成的机会
8. Control Technology and Exposure Assessment for Occupational Exposure to Beryllium: Beryllium Facility No. 3 - Aluminum/Beryllium Foundry, and Copper/Beryllium Foundry and Machine Shop [R] . Almaguer, D., Burroughs, E., Marlow, D., 2009

机译：铍职业接触控制技术和暴露评估：铍工厂3号 - 铝/铍铸造厂，铜/铍铸造厂和机加工车间

Opportunities of CMOS-MEMS integration through LSI foundry and open facility

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