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Common mode rejection in electrically coupled MEMS resonators utilizing mode localization for sensor applications

机译:用于传感器应用的模式定位的电耦合mEms谐振器中的共模抑制

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摘要

Measuring shifts in eigenstates due to vibration localization in an array of weakly coupled resonators offer two distinct advantages for sensor applications as opposed to the technique of simply measuring resonant frequency shifts: (1) orders of magnitude enhancement in parametric sensitivity and (2) intrinsic common mode rejection. In this paper, we experimentally demonstrate the common mode rejection capabilities of such sensors. The vibration behavior is studied in pairs of nearly identical MEMS resonators that are electrically coupled, and subjected to small perturbations in stiffness under different ambient pressure and temperature. The shifts in the eigenstates for the same parametric perturbation in stiffness are experimentally demonstrated to be over three orders of magnitude greater than corresponding resonant frequency variations. They are also shown to remain relatively constant to variations in ambient temperature and pressure. This increased relative robustness to environmental drift, along with the advantage of ultra-high parametric sensitivity, opens the door to an alternative approach to achieving higher sensitivity and stability in micromechanical sensors.
机译:与简单测量谐振频率偏移的技术相反,测量由于弱耦合谐振器阵列中的振动局部化而引起的本征态偏移为传感器应用提供了两个明显的优势:(1)参数灵敏度提高了几个数量级;(2)本征共模模式拒绝。在本文中,我们通过实验证明了此类传感器的共模抑制能力。在成对的几乎相同的MEMS谐振器对中研究振动行为,这些谐振器是电耦合的,并且在不同的环境压力和温度下受到较小的刚度扰动。实验证明,对于相同的参数刚度扰动,本征态的变化要比相应的共振频率变化大三个数量级。它们还显示出对于环境温度和压力的变化保持相对恒定。这种对环境漂移的相对鲁棒性增强,以及超高参数灵敏度的优势,为在微机械传感器中实现更高灵敏度和稳定性的替代方法打开了大门。

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