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Vacuum packaged low-power resonant MEMS strain gauge

机译:真空封装的低功耗谐振mEms应变计

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摘要

This paper describes a technical approach toward the realization of a low-power temperature-compensated micromachined resonant strain sensor. The sensor design is based on two identical and orthogonally-oriented resonators where the differential frequency is utilized to provide an output proportional to the applied strain with temperature compensation achieved to first order. Interface circuits comprising of two front-end oscillators, a mixer, and low-pass filter are designed and fabricated in a standard 0.35- ?m CMOS process. The characterized devices demonstrate a scale factor of 2.8 Hz/ ?? over a strain range of 1000 ?? with excellent linearity over the measurement range. The compensated frequency drift due to temperature is reduced to 4% of the uncompensated value through this scheme. The total continuous power consumption of the strain sensor is 3 ?W from a 1.2 V supply. This low power implementation is essential to enable battery-powered or energy harvesting enabled monitoring applications.
机译:本文介绍了一种实现低功率温度补偿微机械谐振传感器的技术方法。传感器设计基于两个相同且正交的谐振器,其中利用差分频率提供与施加的应变成比例的输出,并实现一级温度补偿。由两个前端振荡器,一个混频器和一个低通滤波器组成的接口电路是以标准的0.35?m CMOS工艺设计和制造的。表征器件的比例系数为2.8 Hz /?在1000应变范围内在整个测量范围内具有出色的线性度。通过该方案,由于温度引起的补偿频率漂移降低到未补偿值的4%。使用1.2 V电源时,应变传感器的总连续功耗为3W。这种低功耗实现对于启用电池供电或能量收集启用的监视应用至关重要。

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