Screen printed free-standing resonator with piezoelectric excitation and detection on flexible substrate

摘要

This paper reports the design, fabrication and testing of a free-standing encastre beam resonator which is entirely fabricated using screen printing onto a flexible polyimide substrate. The design of the free free-standing resonator was achieved using sacrificial techniques. The resonator was designed to be excited at one end of an encastrethe beam and the vibrations detected on the other end using piezoelectric material. The resonator was 11mm long and 4mm wide with an air gap of 119µm, created by selectively removing the sacrificial layer. The device resonates in air with maximum amplitude of 0.1545 volt at fundamental frequency of 3.834 kHz