This paper describes a MEMS oscillator capable of operation at atmospheric pressure, based on a square-extensional mode single crystal silicon resonator. The resonator is actuated by differential capacitive driving and the motion of the structure is transduced piezoresistively. This transduction scheme successfully mitigates the effects of capacitive feedthrough and enhances the motional signal at micron scale transduction gaps. The oscillator demonstrates an Allan deviation of close to 1 ppm at an integration time of 200 seconds for an output power level of 0 dBm.
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