Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining

摘要

A silica micro-cantilever with intrinsically defined planar Bragg gratings has been fabricated using a combination of direct UV writing and micromachining, in a silica-on-silicon platform. Through optically monitoring the response of the Bragg gratings, defined within the cantilever, induced stresses can be measured. The fabricated silica cantilever is 65µm wide, 40µm thick and 3mm in length. It contains three planar Bragg gratings and can attain ~60nm deflection resolution.