Fabrication of multilayer crystalline rib waveguides by a combined multi-step Pulsed Laser Deposition/precision machining technique

摘要

With low thresholds and high gain, channel and rib waveguide lasers are of interest both as stand-alone devices and as components in integrated optical circuits. A number of approaches may be taken to fabricate such structures, including direct bonding, ion implantation or diffusion and post-processing of deposited films. However, many of these techniques can be prohibitively slow and costly, particularly for rapid prototyping.