Microprocessor implemented self-validation of a thick-film PZT/silicon accelerometer

摘要

This paper describes a piezoelectric micromachined silicon accelerometer fabricated using a combination of thick-film printing and silicon micromachining and introduces a microprocessor implemented self validation routine for the device. The thick-film printed PZT elements act as sensors detecting the deflections of the inertial mass and also as actuators capable of performing a self-test routine. The self validation procedure is performed at resonance and therefore a microprocessor is used to identify the resonant frequency associated with each device and confirm the operation of the PZT elements. Whilst this approach is certainly feasible, its implementation could be simplified by reducing the cross talk between drive and detection elements and altering the geometry of the accelerometer. The performance of the device demonstrates the suitability of thick-film printed piezoelectrics for this type of application.