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Laser-induced forward transfer of focussed ion beam pre-machined donors

机译:聚焦离子束预加工供体的激光诱导正向转移

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摘要

In this paper we report femtosecond laser-induced forward transfer (LIFT) of pre-machined donor films. 1 µm thick zinc oxide (ZnO) films were first machined using the focussed ion beam (FIB) technique up to a depth of 0.8 µm. Debris-free micro-pellets of ZnO with extremely smooth edges and surface uniformity were subsequently printed from these pre-machined donors using LIFT. Printing results of non-machined ZnO donor films and films deposited on top of a polymer dynamic release layer (DRL) are also presented for comparison, indicating the superior quality of transfer achievable and utility of this pre-machining technique.
机译:在本文中,我们报告了飞秒激光诱导的预加工供体膜的正向转移(LIFT)。首先使用聚焦离子束(FIB)技术将厚度为1 µm的氧化锌(ZnO)薄膜加工到0.8 µm的深度。随后,使用LIFT从这些经过预加工的供体上印刷了具有极光滑边缘和表面均匀性的无碎片ZnO微丸。还列出了未加工的ZnO供体薄膜和沉积在聚合物动态释放层(DRL)上的薄膜的印刷结果,以进行比较,表明该预加工技术可实现出色的转移质量和实用性。

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