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Metal oxide semiconductor thin-film transistors for flexible electronics

机译:用于柔性电子的金属氧化物半导体薄膜晶体管

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摘要

The field of flexible electronics has rapidly expanded over the last decades, pioneering novel applications, such as wearable and textile integrated devices, seamless and embedded patch-like systems, soft electronic skins, as well as imperceptible and transient implants. The possibility to revolutionize our daily life with such disruptive appliances has fueled the quest for electronic devices which yield good electrical and mechanical performance and are at the same time light-weight, transparent, conformable, stretchable, and even biodegradable. Flexible metal oxide semiconductor thin-film transistors (TFTs) can fulfill all these requirements and are therefore considered the most promising technology for tomorrow's electronics. This review reflects the establishment of flexible metal oxide semiconductor TFTs, from the development of single devices, large-area circuits, up to entirely integrated systems. First, an introduction on metal oxide semiconductor TFTs is given, where the history of the field is revisited, the TFT configurations and operating principles are presented, and the main issues and technological challenges faced in the area are analyzed. Then, the recent advances achieved for flexible n-type metal oxide semiconductor TFTs manufactured by physical vapor deposition methods and solution-processing techniques are summarized. In particular, the ability of flexible metal oxide semiconductor TFTs to combine low temperature fabrication, high carrier mobility, large frequency operation, extreme mechanical bendability, together with transparency, conformability, stretchability, and water dissolubility is shown. Afterward, a detailed analysis of the most promising metal oxide semiconducting materials developed to realize the state-of-the-art flexible p-type TFTs is given. Next, the recent progresses obtained for flexible metal oxide semiconductor-based electronic circuits, realized with both unipolar and complementary technology, are reported. In particular, the realization of large-area digital circuitry like flexible near field communication tags and analog integrated circuits such as bendable operational amplifiers is presented. The last topic of this review is devoted for emerging flexible electronic systems, from foldable displays, power transmission elements to integrated systems for large-area sensing and data storage and transmission. Finally, the conclusions are drawn and an outlook over the field with a prediction for the future is provided.
机译:在过去的几十年中,柔性电子领域迅速发展,开创了新颖的应用领域,例如可穿戴和纺织品集成设备,无缝和嵌入式的类似补丁的系统,柔软的电子皮肤以及不易察觉和短暂的植入物。用这种破坏性电器改变我们日常生活的可能性推动了对电子设备的追求,这些电子设备应具有良好的电气和机械性能,同时又要轻巧,透明,舒适,可拉伸甚至可生物降解。柔性金属氧化物半导体薄膜晶体管(TFT)可以满足所有这些要求,因此被认为是未来电子产品最有希望的技术。这篇评论反映了柔性金属氧化物半导体TFT的建立,从单个器件的开发,大面积电路到完全集成的系统。首先,介绍了金属氧化物半导体TFT,回顾了该领域的历史,介绍了TFT的配置和工作原理,并分析了该领域面临的主要问题和技术挑战。然后,总结了通过物理气相沉积方法和溶液处理技术制造的柔性n型金属氧化物半导体TFT的最新进展。特别地,显示了柔性金属氧化物半导体TFT结合低温制造,高载流子迁移率,大频率操作,极高的机械可弯曲性以及透明性,顺应性,可拉伸性和水溶性的能力。然后,详细分析了为实现最先进的柔性p型TFT而开发的最有前途的金属氧化物半导体材料。接下来,报告了利用单极技术和互补技术实现的基于柔性金属氧化物半导体的电子电路的最新进展。特别是,提出了诸如柔性近场通信标签之类的大面积数字电路以及诸如可弯曲运算放大器之类的模拟集成电路的实现。这篇综述的最后一个主题专门针对新兴的柔性电子系统,从可折叠显示器,功率传输元件到用于大面积传感以及数据存储和传输的集成系统。最后,得出结论,并提供对该领域的展望以及对未来的预测。

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