Charging of dielectric materials in microelectromechanical\udsystems (MEMS) actuated electrostatically is a major\udreliability issue. In our previous work we proposed a feedback\udloop control method that is implemented as a circuit and that\udallows smart actuation for switches and varactors. In this paper\udwe discuss system-level modeling of MEMS devices including\udall aspects of the system: proposed control method, charging\uddynamics and realistic models of the mechanical components of\udMEMS.
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