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Investigation of the Physical Properties, Performance and Application of MEMS Sensors Based on Bulk Acoustic Waves excited in Piezoelectric Thin Film Devices

机译：基于压电薄膜器件激励的体声波的mEms传感器物理性能，性能及应用研究

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Weber Jan;
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1. Polarization control of ScAIN, ZnO and PbTiO_3 piezoelectric films: application to polarization-inverted multilayer bulk acoustic wave and surface acoustic wave devices [J] . Yanagitani Takahiko, Takayanagi Shinji Japanese journal of applied physics . 2021,第SD期

机译：SCAIN，ZnO和PBTIO_3压电薄膜的偏振控制：偏振倒多层散装声波和表面声波器件的应用
2. Nitrogen [N]-incorporated ZnO piezoelectric thin films and their application for ultra-small film bulk acoustic wave resonator device fabrication [J] . Eunju Lee, Ruirui Zhang, Giwan Yoon Journal of Applied Physics . 2011,第7期

机译：掺氮[N]的ZnO压电薄膜及其在超小薄膜体声波谐振器中的应用
3. Pulsed laser deposition of piezoelectric ZnO thin films for bulk acoustic wave devices [J] . Rafik Serhane, Samira Abdelli-Messaci, Slimane Lafane, Applied Surface Science . 2014,第JANa1期

机译：用于体声波器件的压电ZnO薄膜的脉冲激光沉积
4. Estimation of physical constants of silicon-based polymer thin films using surface acoustic waves and their application to liquid sensor [C] . Furukawa, S., Nomura, . 1998

机译：利用表面声波估计硅基聚合物薄膜的物理常数及其在液体传感器中的应用
5. Techniques to facilitate the fabrication of zinc oxide-based thin film bulk acoustic wave devices. [D] . Pinkett, Shawn L. 2003

机译：有助于制造基于氧化锌的薄膜体声波器件的技术。
6. Physical properties of metal-doped zinc oxide films for surface acoustic wave application [O] . Sang-Hun Nam, Sang-Jin Cho, Jin-Hyo Boo 2012

机译：用于表面声波的金属掺杂氧化锌薄膜的物理性质
7. Study on high performance Bulk acoustic devices employing AIN piezoelectric thin film [O] . 上田政則, Masanori Ueda 2009

机译：采用AIN压电薄膜的高性能体声器件研究
8. Effects on Ferroelectric Thin-Film Stacks and Devices for Piezoelectric MEMS Applications at Varied Total Ionizing Dose (TID). [R] . Rivas, M., Brewer, S. J., Callaway, C., 2017

机译：不同总电离剂量（TID）对压电mEms应用的铁电薄膜叠层和器件的影响。

Investigation of the Physical Properties, Performance and Application of MEMS Sensors Based on Bulk Acoustic Waves excited in Piezoelectric Thin Film Devices

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