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Flip-chip bonding of fine-pitch ultra-thin chips for SiF applications

机译:用于siF应用的细间距超薄芯片的倒装芯片焊接

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摘要

This paper describes the successful process investigations on ultrathin flip-chip bonding for fine-pitch applications on foil, using a novel bonding process involving Isotropic Conductive Adhesives (ICA). A Ag-based B-stage curing ICA was printed using state-of-the-art electroformed stencil on printed Ag circuitry, pre-cured and flip-chip bonded at low bonding force and short duration. The interconnection resistance measurements, performed before and after a stabilizing underfilling step, revealed low interconnect resistances down to 150 μm bond pad pitch. Finally, the reliability of the specimens prepared using this process was successfully evaluated by means of standard reliability test procedures such as thermal shock testing and accelerated humidity testing.
机译:本文介绍了一种使用涉及各向同性导电胶粘剂(ICA)的新型粘合工艺对箔上的细间距应用进行超薄倒装芯片粘合的成功工艺研究。使用最先进的电铸模版在印刷的Ag电路上印刷基于Ag的B级固化ICA,以低粘合力和较短的时间进行预固化和倒装芯片粘合。在稳定的底部填充步骤之前和之后进行的互连电阻测量显示,互连电阻低至150μm键合焊盘间距。最后,通过标准的可靠性测试程序(例如热冲击测试和加速湿度测试)成功评估了使用此方法制备的样品的可靠性。

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