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Nanometer Resolution Actuator with Multi-Millimeter Range and Power-Off Hold*

机译：具有多毫米范围和断电保持功能的纳米分辨率执行器*

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Galen Powers; Qin Xu; John Fasick; James Smith;
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年度 2015
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1. A sandwich piezoelectric actuator with long stroke and nanometer resolution by the hybrid of two actuation modes [J] . Deng Jie, Chen Weishan, Li Kai, Sensors and Actuators, A. Physical . 2019,第期

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2. High-speed Scanner with Nanometer Resolution Using a Hybrid Reluctance Force Actuator [J] . Shingo Ito, Stefan Troppmair, Francesco Cigarini, IEEJ Journal of Industry Applications . 2019,第2期

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3. Design and fabrication of a high-speed linear piezoelectric actuator with nanometer resolution using a cantilever transducer [J] . Wang Liang, Liu Junkao, Chen Shuo, Smart Materials & Structures . 2019,第5期

机译：悬臂换能器具有纳米分辨率高速线性压电致动器的设计与制造
4. The next generation of Inchworm actuators evolves with nanometer resolution, multi-millimeter range and power-off hold [C] . Galen Powers, Qin Xu, James Smith Conference on Industrial and Commercial Applications of Smart Structures Technologies; 20040316-20040318; San Diego,CA; US . 2004

机译：下一代Inchworm执行器具有纳米分辨率，多毫米范围和断电保持功能
5. Tip Induced Quenching Imaging: Topographic and Optical Resolutions in the Nanometer Range [D] . Schulz, Olaf 2012

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6. Sensor for the Characterization of 2D Angular Actuators with Picoradian Resolution and Nanoradian Accuracy with Microradian Range [O] . Marco Pisani, Milena Astrua, Srijith Bangaru Thirumalai Raj 2020

机译：传感器具有普罗拉德分辨率的2D角致动器和Microradian系列的纳米径精度
7. High-speed Scanner with Nanometer Resolution Using a Hybrid Reluctance Force Actuator [O] . Shingo Ito, Stefan Troppmair, Francesco Cigarini, 2019

机译：具有纳米分辨率的高速扫描仪，使用混合磁阻致动器
8. Linear Actuator System with 1-Angstrom Closed-Loop Control Resolution and 50-milimeter Travel Range [R] . Shu, D., Ham, Y., Toellner, T. S. 2002

机译：线性执行器系统，具有1埃的闭环控制分辨率和50毫米的行程范围

Nanometer Resolution Actuator with Multi-Millimeter Range and Power-Off Hold*

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