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Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors

机译：用于扫描微镜的角度垂直梳状驱动器的理论和实验

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Dooyoung Hah; Pamela R. Patterson; Hung D. Nguyen; Student Member; Hiroshi Toshiyoshi; Ming C. Wu;
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1. Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors [J] . Dooyoung Hah, Patterson P.R., Nguyen H.D., IEEE journal of selected topics in quantum electronics . 2004,第3期

机译：扫描微镜角度垂直梳状驱动器的理论与实验
2. Dynamic Properties of Angular Vertical Comb-Drive Scanning Micromirrors With Electrothermally Controlled Variable Offset [J] . Bauer R., Li Li, Uttamchandani D. Microelectromechanical Systems, Journal of . 2014,第4期

机译：具有电热控制可变偏移的角垂直梳状驱动扫描微镜的动态特性
3. A self-aligned vertical comb-drive actuator on an SOI wafer for a 2D scanning micromirror [J] . Hah D, Choi CA, Kim CK, Journal of Micromechanics and Microengineering . 2004,第8期

机译：用于2D扫描微镜的SOI晶圆上的自对准垂直梳状驱动致动器
4. A novel continuously variable angular vertical comb-drive with application in scanning micromirror [C] . Bauer Ralf, Brown Gordon, Li Li, IEEE International Conference on Micro Electro Mechanical Systems . 2013

机译：一种新颖的连续可变角度垂直梳状驱动器及其在扫描微镜中的应用
5. MEMS scanning micromirrors with a new electrostatic angular vertical combdrive. [D] . Patterson, Pamela Rae. 2003

机译：带有新型静电角垂直梳状驱动器的MEMS扫描微镜。
6. PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning [O] . Shanshan Gu-Stoppel, Thorsten Giese, Hans-Joachim Quenzer, 2017

机译：具有大扫描角度的PZT致动和感应谐振微镜采用机械杠杆放大技术进行双轴扫描
7. Dynamic properties of angular vertical comb-drive scanning micromirrors with electrothermally controlled variable offset [O] . Bauer, Ralf, Li, Li, Uttamchandani, Deepak 2014

机译：具有电热控制可变偏移的角垂直梳状驱动扫描微镜的动态特性
8. Gyroscope and Micromirror Design Using Vertical-Axis CMOS-MEMS Actuation and Sensing [R] . Xie, H. 2002

机译：使用垂直轴CmOs-mEms驱动和传感的陀螺仪和微镜设计

Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors

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