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POLYSILICON-FILLED CARBON NANOTUBE GRASS STRUCTURAL MATERIAL FOR MICROMECHANICAL RESONATORS

机译：用于微机械谐振器的聚硅氧烷填充碳纳米管草结构材料

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Wei-chang Li; Yingqi Jiang; Robert A. Schneider; Henry G. Barrow; Liwei Lin; Clark;
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年度 2014
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POLYSILICON-FILLED CARBON NANOTUBE GRASS STRUCTURAL MATERIAL FOR MICROMECHANICAL RESONATORS

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