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Diamond turning of soft semiconductors to obtain nanometric mirror surfaces

机译:对软半导体进行金刚石车削以获得纳米镜面

摘要

Diamond cutting is a viable alternative to grinding and polishing in the fabrication of high-quality soft semiconductors. Investigation of indentation provides useful information for understanding the practical diamond cutting process of brittle materials. Cutting forces and temperatures were analysed using a Kistler dynamometer and an infrared technique. A zero rake angle cutting tool was found to be most efficient, partly because the effective rake is really a strong negative rake brought about by the peculiar configuration of very low feeds and depths of cut. This is explained by means of the comparison of the force distribution between conventional turning and ultraprecision machining. Atomic force microscopy and scanning electron microscopy were used to study the surfaces. Zinc sulfide gave subnanometric surfaces (0.88 m) and zinc selenide gave Ra values of 2.91 nm.
机译:金刚石切割是制造高质量软半导体中研磨和抛光的可行替代方法。压痕的研究为了解脆性材料的实际金刚石切割工艺提供了有用的信息。使用Kistler测力计和红外技术分析切削力和温度。人们发现零前角切削工具是最有效的,部分原因是有效前角实际上是由非常低的进给量和切削深度构成的强大的负前角。这是通过比较常规车削和超精密加工之间的力分布来解释的。使用原子力显微镜和扫描电子显微镜研究表面。硫化锌的表面为亚纳米级(0.88 m),硒化锌的Ra值为2.91 nm。

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