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Optimum KOH Wet Etching of Cantilever Tip for Better Image Captured by Nanoeducator

机译：最佳KOH湿法蚀刻悬臂尖端，以获得更好的纳米复合材料图像

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Agus Geter; Edy Sutjipto; Waleed Fekry Faris; Erry Y. T. Adesta; Hafizah Hanim;
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1. Fabrication of GaN-based striped structures along the < 1120 > direction by the combination of RIE dry-etching and KOH wet-etching techniques to recover dry-etching damage [J] . Morimichi Itoh, Toru Kinoshita, Koji Kawasaki, Physica Status Solidi. C, Conferences and critical reviews . 2006,第6期

机译：通过RIE干蚀刻和KOH湿蚀刻技术结合沿<1120>方向制造GaN基条纹结构，以恢复干蚀刻损伤
2. Straight and Smooth Etching of GaN (1100) Plane by Combination of Reactive Ion Etching and KOH Wet Etching Techniques [J] . Morimichi Itoh, Toru Kinoshita, Choshiro Koike, Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2006,第5A期

机译：结合反应性离子刻蚀和KOH湿法刻蚀技术对GaN（1100）平面进行平直而平滑的刻蚀
3. ELECTROCHEMICAL WET ETCHING m KOH:H2O SOLUTION AND SECONDARY/ION IMAGE PASSIVE VOLTAGE CONTRAST AS A COMPLEMENTARY TECHNIQUE IN FAILURE ANALYSIS [J] . Oh Chong Khiam, Bi Jian Hua, Shailesh Redkar Microelectronics & Reliability . 2000,第8a10期

机译：电化学湿蚀刻m KOH：H2O溶液和二次/离子图像被动电压对比作为故障分析中的补充技术
4. Optimum KOH Wet Etching of Cantilever Tip for Better Image Captured by Nanoeducator [C] . Agus Geter Edy Sutjipto, Waleed Fekry Faris, Erry Y. T. Adesta, International Conference on Green Power, Materials and Manufacturing Technology and Applications . 2011

机译：悬臂尖端的最佳KOH湿法蚀刻，用于纳米教机捕获的更好图像
5. Optimal design for simultaneous control of critical dimension and side wall slope in wet etching. [D] . Zhou, Bo. 1996

机译：湿蚀刻中同时控制临界尺寸和侧壁斜率的最佳设计。
6. Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution [O] . Han Lu, Hua Zhang, Mingliang Jin, 2016

机译：KOH溶液中Si的一步各向异性湿法腐蚀制备的两层微结构
7. Effects of deep wet etching in HF/HNO$_3$ and KOH solutions on the laser damage resistance and surface quality of fused silica optics at 351 nm [O] . Pfiffer, Mathilde, Cormont, Philippe, Fargin, Evelyne, 2017

机译：HF / HNO $ _3 $和KOH溶液中的深湿蚀刻对351 nm熔融石英光学元件的抗激光损伤性和表面质量的影响

Optimum KOH Wet Etching of Cantilever Tip for Better Image Captured by Nanoeducator

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