Prism coupling measurement of benzocyclobutene (BCB 4024-40) polymer for optical devices application

摘要

Prism coupling method is employed in the characterization process of BenzoCyclobutene (BCB 4024-40) polymer slab structure. This method is used to characterize the polymer refractive index, variation of film thickness with spin coating speed and average value of polymer loss. The information obtained is appreciably useful, particularly in the actual design of optical waveguides and devices based on BCB 4024-40 polymer material.