首页> 外文OA文献 >Subsurface Imaging of Integrated Circuits with Widefield and Confocal Microscopy Using Numerical Aperture Increasing Lens

【2h】

Subsurface Imaging of Integrated Circuits with Widefield and Confocal Microscopy Using Numerical Aperture Increasing Lens

机译：使用数值孔径增加透镜的宽场和共焦显微镜对集成电路进行次表面成像

页面导航

著录项
相似文献
相关主题

著录项

作者
F. Hakan Köklü; A. N. Vamivakas; J. I. Quesnel; B. B. Goldberg; M. S. ¨unlü;
展开▼
作者单位

展开▼
年度 2015
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. Confocal Annular Aperture Microscopy and NAIL Allow High Lateral Resolution in Backside Imaging of Integrated Circuits [J] . Joan J. Carvajal MRS bulletin . 2009 ,第6期

机译：共焦环形孔径显微镜和NAIL在集成电路背面成像中具有较高的横向分辨率
2. Failure analysis of integrated circuits beyond the diffraction limit: contact mode near-field scanning optical microscopy with integrated resistance, capacitance, and UV confocal imaging [J] . Lewis A., Shambrot E. Proceedings of the IEEE . 2000 ,第9期

机译：超出衍射极限的集成电路故障分析：具有集成电阻，电容和UV共聚焦成像的接触模式近场扫描光学显微镜
3. Response to 'Comment on 'Theoretical analysis of numerical aperture increasing lens microscopy'' [J. Appl. Phys. 97, 053105 (2005)] [J] . M. S. Uenlue, S. B. Ippolito, A. N. Vamivakas, Journal of Applied Physics . 2006 ,第8期

机译：回应“对'数值孔径增加透镜显微镜的理论分析'的评论” [J.应用物理97，053105（2005）]
4. Subsurface Imaging of Integrated Circuits with Widefield and Confocal Microscopy Using Numerical Aperture Increasing Lens [C] . Koklu, F.H., Vamivakas, LEOS Annual Meeting Conference Proceedings, 2007 IEEE . 2007

机译：使用数值孔径增加透镜在宽表面和共聚焦显微镜下对集成电路进行亚表面成像
5. High numerical aperture injection-molded miniature objective for fiber-optic confocal reflectance microscopy. [D] . Chidley, Matthew Douglas. 2005

机译：高数值孔径的注塑微型物镜，用于光纤共聚焦反射显微镜。
6. Wide-field imaging combined with confocal microscopy using a miniature f/5 camera integrated within a high NA objective lens [O] . David L. Dickensheets, Seth Kreitinger, Gary Peterson, -1

机译：使用集成在高NA物镜中的微型f / 5相机进行宽视野成像与共焦显微镜相结合
7. Widefield subsurface microscopy of integrated circuits [O] . F. Hakan Köklü, J. I. Quesnel, B. B. Goldberg, 2008

机译：集成电路的宽场次表面显微镜
8. High Resolution, High Collection Efficiency in Numerical Aperture Increasing Lens Microscopy of Individual Quantum Dots. [R] . A. N. Vamivakas B. B. Goldberg M. S. Unlu S. B. Ippolito Z. Liu 2005

机译：数值孔径中的高分辨率，高收集效率增加单个量子点的透镜显微镜。

Subsurface Imaging of Integrated Circuits with Widefield and Confocal Microscopy Using Numerical Aperture Increasing Lens

著录项

相似文献

相关主题

期刊订阅