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Effect of Substrate Material and Electrode Surface Preparation on Stress and Piezoelectric Properties of Aluminum Nitride

机译：基体材料和电极表面制备对氮化铝应力和压电性能的影响

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Sergey Mishin; Michael Gutkin;
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年度 2015
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1. Influence of aluminum nitride interlayers on crystal orientation and piezoelectric property of aluminum nitride thin films prepared on titanium electrodes [J] . Toshihiro Kamohara, Morito Akiyama, Naohiro Ueno, Thin Solid Films . 2007,第11期

机译：氮化铝中间层对钛电极上制备的氮化铝薄膜的晶体取向和压电性能的影响
2. Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO&sub&3&/sub&) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software [J] . Ahmad M. Alsaad, Ahmad A. Ahmad, Qais M. Al-Bataineh, Open Journal of Applied Sciences . 2019,第4期

机译：使用COMSOL Multiphysics软件设计和分析基于MEMS的氮化铝（AlN），铌酸锂（LiNbO 3 / sub）和具有不同基板材料的氧化锌（ZnO）悬臂，它们具有不同的基板材料
3. Modeling of the effects of different substrate materials on the residual thermal stresses in the aluminum nitride crystal grown by sublimation [J] . R. G. Lee A. Idesman L. Nyakiti and J. Chaudhuri Journal of Applied Physics . 2009,第3期

机译：模拟不同衬底材料对通过升华生长的氮化铝晶体中残余热应力的影响
4. Effect of substrate material and electrode surface preparation on stress and piezoelectric properties of aluminum nitride [C] . Mishin Sergey, Gutkin Michael 2011 Joint Conference of the IEEE International Frequency Control Symposium European Frequency and Time Forum . 2011

机译：基材和电极表面处理对氮化铝应力和压电性能的影响
5. Aluminum nitride thin films on titanium: Piezoelectric transduction on a metal substrate. [D] . Boeshore, Seth E. 2006

机译：钛上的氮化铝薄膜：金属基板上的压电换能。
6. Tungsten as a Chemically-Stable Electrode Material on Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices [O] . Gayatri K. Rane, Marietta Seifert, Siegfried Menzel, 2016

机译：钨作为用于高温SAW器件的含Ga压电衬底Langasite和Catangasite上化学稳定的电极材料
7. Numerical Analysis and Optimization on Piezoelectric Properties of 0–3 Type Piezoelectric Cement-Based Materials with Interdigitated Electrodes [O] . Jianlin Luo, Chenglin You, Shuai Zhang, 2017

机译：0-3型压电水泥基交叉电极材料压电性能的数值分析与优化

Effect of Substrate Material and Electrode Surface Preparation on Stress and Piezoelectric Properties of Aluminum Nitride

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