首页> 外文OA文献 >Study of the Thermal and Intrinsic Stress of Large Area Diamond Film Prepared by HFCVD

【2h】

Study of the Thermal and Intrinsic Stress of Large Area Diamond Film Prepared by HFCVD

机译：HFCVD制备大面积金刚石薄膜的热和内应力研究

页面导航

著录项
相似文献
相关主题

著录项

作者
Feng Xu; Dunwen Zuo; Wenzhuang Lu; Min Wang; Haiyu Zhang;
展开▼
作者单位

展开▼
年度 2015
总页数
原文格式 PDF
正文语种
中图分类

相似文献

外文文献
中文文献
专利

1. Study of the Thermal and Intrinsic Stress of Large Area Diamond Film Prepared by HFCVD [J] . Feng Xu, Dunwen Zuo, Wenzhuang Lu, Key Engineering Materials . 2008,第期

机译：HFCVD法制备大面积金刚石薄膜的热应力和本征应力的研究
2. Thermal Stress and Intrinsic Stress in Nanocrystalline Diamond Film Prepared by Hot Filament Chemical Vapor Deposition [J] . Xu Feng, Zuo Dun-wen, Lu Wen-zhuang, Advanced Science Letters . 2012,第2期

机译：热丝化学气相沉积法制备纳米晶金刚石薄膜的热应力和本征应力
3. Stress study of HFCVD boron-doped diamond films by X-ray diffraction measurements [J] . N. G. Ferreira, E. Abramof, E. J. Corat, Diamond and Related Materials . 2001,第3aPta2期

机译：X射线衍射测量HFCVD掺硼金刚石薄膜的应力研究
4. Study of the Thermal and Intrinsic Stress of Large Area Diamond Film Prepared by HFCVD [C] . Feng Xu, Dunwen Zuo, Wenzhuang Lu, International Conference on Advances in Machining Manufacturing Technology in China . 2008

机译：HFCVD制备的大面积金刚石薄膜的热和内在应力研究
5. Thermal degradation and tribological behavior of diamond-like carbon films prepared by plasma-assisted chemical vapor deposition. [D] . Kim, Daesig. 1991

机译：通过等离子体辅助化学气相沉积制备的类金刚石碳膜的热降解和摩擦学行为。
6. Study of the Thermal Annealing on Structural and Morphological Properties of High-Porosity A-WO3 Films Synthesized by HFCVD [O] . M. Cruz-Leal, O. Goiz, F. Chávez, 2019

机译：热退火对HFCVD合成高孔隙率A-WO3薄膜结构和形貌特性的影响
7. Bulk and surface thermal stability of ultra nanocrystalline diamond films with 10-30 nm grain size prepared by chemical vapor deposition [O] . Michaelson, Sh., Stacey, A., Orwa, J., 2010

机译：化学气相沉积法制备粒径为10-30 nm的超纳米晶金刚石薄膜的体热稳定性和表面热稳定性
8. Intrinsic SiO2 Film Stress Measurements on Thermally Oxidized Si [R] . Kobeda, E., Irene, E. A. 1986

机译：热氧化硅的本征siO2薄膜应力测量

Study of the Thermal and Intrinsic Stress of Large Area Diamond Film Prepared by HFCVD

著录项

相似文献

相关主题

期刊订阅