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Marangoni Dryer Integrated High Performance Cleaner for Cu/Low k Post Strip Clean for 45nm Technology Node and Beyond

机译：marangoni干燥器集成高性能清洁剂，适用于Cu / Low k接地条清洁，适用于45nm技术节点及其后

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Jianshe Tang; Wei Lu; Bo Xie; Eli Martinez; Fred Li; Alex Ko; Craig Todd; John Tc Lee;
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1. Marangoni Dryer Integrated High Performance Cleaner for Cu/Low kPost Strip Clean for 45nm Technology Node and Beyond [J] . Jianshe Tang, Wei Lu, Bo Xie, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2008,第Null期

机译：Marangoni干燥机集成的高性能清洁剂，适用于45nm技术节点及以后的Cu /低kPost带材清洁
2. Marangoni Dryer Integrated High Performance Cleaner for Cu/Low kPost Strip Clean for 45nm Technology Node and Beyond [J] . Jianshe Tang, Wei Lu, Bo Xie, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2008,第Null期

机译：Marangoni干燥机集成的高性能清洁剂，适用于45nm技术节点及以后的Cu /低kPost带材清洁
3. Marangoni Dryer Integrated High Performance Cleaner for Cu/Low k Post Strip Clean for 45nm Technology Node and Beyond [J] . Jianshe Tang, Wei Lu, Bo Xie, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2008,第0期

机译：Marangoni干燥机集成的高性能清洁剂，用于45nm工艺节点及以后的Cu / Low k柱后剥离清洗
4. Marangoni Dryer Integrated High Performance Cleaner for Cu/Low k Post Strip Clean for 45nm Technology Node and Beyond [C] . Jianshe Tang, Wei Lu, Bo Xie, International Symposium on Ultra Clean Processing of Silicon Surfaces . 2008

机译：Marangoni烘干机集成高性能清洁剂，用于CU / LOW K POST TLAS清洁45nm技术节点及更远
5. Experimental evaluation of indoor air cleaning technologies and modeling of UV-PCO (photocatalytic oxidation) air cleaners under multiple VOCs conditions. [D] . Chen, Wenhao. 2007

机译：室内空气净化技术的实验评估以及在多种VOC条件下对UV-PCO（光催化氧化）空气净化器的建模。
6. Data on performance of air stripping tower- PAC integrated system for removing of odor taste dye and organic materials from drinking water-A case study in Saqqez Iran [O] . Meghdad Pirsaheb, Jalil Mohammadi, Touba Khosravi, 2018

机译：空气汽提塔性能数据-PAC集成系统用于去除饮用水中的气味味道染料和有机物质-伊朗萨克兹的案例研究
7. Below the 45nm technology node [O] . 2006

机译：在45nm技术节点以下

Marangoni Dryer Integrated High Performance Cleaner for Cu/Low k Post Strip Clean for 45nm Technology Node and Beyond

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