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MECHANICAL PROPERTIES OF SILICON-BASED MEMBRANE WINDOWS APPLIED FOR A MINIATURE ELECTRON BEAM RADIATION SYSTEM

机译：硅基膜窗的机械性能应用于微型电子束辐射系统

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M. Yamaguchi; Y. Yamada; M. Shikida; K. Sato;
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年度 1633
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2. DEVELOPMENT OF A SILICON-BASED ELECTRON BEAM TRANSMISSION WINDOW FOR USE IN A KrF EXCIMER LASER SYSTEM [J] . C. A. GENTILE, H. M. FAN, J. W. HARTFIELD, Fusion Science and Technology . 2003,第3期

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MECHANICAL PROPERTIES OF SILICON-BASED MEMBRANE WINDOWS APPLIED FOR A MINIATURE ELECTRON BEAM RADIATION SYSTEM

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