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Characterization of Organic Contaminants Outgassed from Materials Used in Semiconductor Fabs/Processing

机译：用于半导体制造/加工的材料中脱气的有机污染物的表征

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Peng Sun; Caroline Ayre; Matthew Wallacea;
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1. Organic Outgassing Behavior of Plastic Material and Reduction of Organic Contamination in Semiconductor Equipment [J] . Misako Saito, Katsuhiko Anbai, Teruyuki Hayashi IEEE Transactions on Semiconductor Manufacturing . 2005,第4期

机译：半导体设备中塑料的有机脱气行为和有机污染物的减少
2. Fabrication and characterization of controllable grain boundary arrays in solution-processed small molecule organic semiconductor films [J] . Wo Songtao, Headrick Randall L., Anthony John E. Journal of Applied Physics . 2012,第7期

机译：固溶处理的小分子有机半导体膜中可控晶界阵列的制备与表征
3. Fabrication and characterization of controllable grain boundary arrays in solution-processed small molecule organic semiconductor films [J] . Songtao Wo, Randall L Headrick, John E. Anthony Journal of Applied Physics . 2012,第7pta1期

机译：固溶处理的小分子有机半导体膜中可控晶界阵列的制备与表征
4. Characterization of Organic Contaminants Outgassed from Materials Used in Semiconductor Fabs/Processing [C] . Peng Sun, Caroline Ayre, Matthew Wallace 2003 International Conference on Characterization and Metrology for ULSI Technology; Mar 24-28, 2003; Austin, Texas . 2003

机译：从半导体晶圆厂/加工中使用的材料中释放出的有机污染物的特征
5. Developing non-invasive processing methodologies and understanding the materials properties of solution-processable organic semiconductors for organic electronics. [D] . Dickey, Kimberly Christine. 2007

机译：开发非侵入性加工方法并了解有机电子可溶液加工的有机半导体的材料特性。
6. Fabrication and Characterization of Novel ZnAl-LayeredDouble Hydroxide for the Superadsorption of Organic Contaminants fromWastewater [O] . Anyu Li, Hua Deng, Chenghui Ye, 2020

机译：新型ZnAl层的制备与表征双重氢氧根对有机污染物的超吸附废水
7. Organic Semiconductor Lasers: Lasing Operation under Long‐Pulse Excitation in Solution‐Processed Organic Gain Medium: Toward CW Lasing in Organic Semiconductors (Advanced Optical Materials 21/2020) [O] . Van T. N. Mai, Atul Shukla, A. M. Chathuranganie Senevirathne, 2020

机译：有机半导体激光器：溶液加工有机增益介质中的长脉冲激发下的激光操作：朝向有机半导体的CW激光（先进的光学材料21/2020）
8. Semiconductor Measurement Technology: Survey of Optical Characterization Methodsfor Materials, Processing, and Manufacturing in the Semiconductor Industry [R] . Bullis, W. M., Perkowitz, S., Seiler, D. G. 1995

机译：半导体测量技术：半导体工业中材料，加工和制造的光学表征方法综述

Characterization of Organic Contaminants Outgassed from Materials Used in Semiconductor Fabs/Processing

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