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Integrated facility layout and material handling system design in semiconductor fabrication facilities

机译：半导体制造设施中的综合设施布局和材料处理系统设计

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Brett A. Peters; Taho Yang;
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年度 1997
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1. Integrated facility layout and material handling system design in semiconductor fabrication facilities [J] . Peters B.A., Taho Yang IEEE Transactions on Semiconductor Manufacturing . 1997,第3期

机译：半导体制造设施中的综合设施布局和材料处理系统设计
2. Alternative facility layouts for semiconductor wafer fabrication facilities [J] . Geiger C.D., Hase R. IEEE transactions on components, packaging, and manufacturing technology. Part C, Manufacturing . 1997,第2期

机译：半导体晶圆制造设施的替代设施布局
3. Interbay automated material handling system stocker design for wafer fabrication facilities [J] . Chiahuang J. Lin, Taho Yang, Jose M. Padillo, International Journal of Manufacturing Technology and Management . 2000,第2a3期

机译：Interbay自动化材料处理系统仓库设计，用于晶圆制造设施
4. Enabling Facility Re-Use for 300mm Semiconductor Manufacturing via Integration of Automated Material Handling System and Facility Design [C] . Seall, S., Steele, . 2006

机译：通过集成自动材料处理系统和工厂设计，使工厂可以重复使用300mm半导体
5. Facility layout and material handling system design integration in manufacturing systems. [D] . Yang, Taho. 1996

机译：在制造系统中进行工厂布局和物料搬运系统设计集成。
6. Process design of industrial-scale membrane distillation system for wastewater treatment in nano-electronics fabrication facilities [O] . Imtisal-e- Noor, Andrew Martin, Olli Dahl 2020

机译：纳米电子制造设施中废水处理工业规模膜蒸馏系统的工艺设计
7. A Spine Layout Design Method For Semiconductor Fabrication Facilities Containing Automated Material Handling Systems [O] . Taho Yang, Brett A. Peters 2007

机译：包含自动化材料处理系统的半导体制造设施的脊线布局设计方法
8. Preconceptual design of a Long-Pulse Spallation Source (LPSS) at the LANSCE Facility: Target system, facility, and material handling considerations [R] . Sommer, W. F. 1995

机译：LaNsCE设施的长脉冲散裂源（Lpss）的前概念设计：目标系统，设施和材料处理注意事项

Integrated facility layout and material handling system design in semiconductor fabrication facilities

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