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Development of Spin Coated Mesoporous Oxide Films for MEMS Structures

机译：mEms结构自旋涂层介孔氧化膜的研制

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Ming C. Wu; Bruce Dunn;
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年度 2003
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1. Development of Spin Coated Mesoporous Oxide Films for MEMS Structures [J] . JONG-AH PAIK, SHIH-KANG FAN, HSIN CHANG, Journal of electroceramics . 2004,第1a3期

机译：用于MEMS结构的旋涂中孔氧化膜的开发
2. Spin coated versus dip coated electrochromic tungsten oxide films: Structure, morphology, optical and electrochemical properties [J] . M. Deepa, T. K. Saxena, D. P. Singh, Electrochimica Acta . 2006,第10期

机译：旋涂与浸涂电致变色氧化钨薄膜：结构，形态，光学和电化学性质
3. Photoinduced formation of thin-film structures in titanium alkoxides via direct deposition from solution and from spin-coated solid-state precursor films [J] . Z.V. Schneider, J.D. Musgraves, K. Simmons-Potter, Journal of Materials Research . 2011,第6期

机译：通过直接从溶液和旋涂固态前驱体薄膜中沉积，在钛醇盐中光诱导形成薄膜结构
4. Use of Viscoelastic Properties of Metal Alkoxide Sols to Control the Microstructure and Quality of Spin-coated Sol-gel Thin-films [C] . Lam Tich Nguyen, Pandiyan Murugaraj, Colin Rix, Conference on Smart Materials II, Dec 16-18, 2002, Melbourne, Australia . 2002

机译：利用金属醇盐溶胶的粘弹性来控制旋涂溶胶凝胶薄膜的微观结构和质量
5. Development and characterization of spin coated oxide films with mesoporous structure. [D] . Paik, Jong-Ah. 2003

机译：具有中孔结构的旋涂氧化膜的开发和表征。
6. Spin-Coated vs. Electrodeposited Mn Oxide Films as Water Oxidation Catalysts [O] . Simelys Hernández, Carminna Ottone, Sara Varetti, 2016

机译：旋涂与电沉积氧化锰薄膜作为水氧化催化剂
7. Reversible, repeatable and low phase transition behaviour of spin coated nanostructured vanadium oxide thin films with superior mechanical properties [O] . Dipta Mukherjee, Arjun Dey, A. Carmel Mary Esther, 2018

机译：具有优异机械性能的旋涂纳米结构氧化钒薄膜的可逆，可重复和低相转变行为
8. Residual Stress and Fracture of PECVD Thick Oxide Films for Power MEMS Structures and Devices [R] . Zhang, X. 2007

机译：功率mEms结构和器件用pECVD厚氧化膜的残余应力和断裂

Development of Spin Coated Mesoporous Oxide Films for MEMS Structures

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