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Plasma molding over surface topography: Simulation of ion flow, and energy and angular distributions over steps in rf high density plasmas

机译：在表面形貌上的等离子体成型：在射频高密度等离子体中的步骤中模拟离子流，能量和角分布

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Doosik Kim; Demetre J. Economou; J. R. Woodworth; P. A. Miller; R. J. Shul; B. P. Aragon; T. W. Hamilton; C. G. Willison;
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年度 2003
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1. Plasma molding over surface topography: Simulation of ion flow, and energy and angular distributions over steps in RF high-density plasmas [J] . Doosik Kim, Economou D.J. IEEE Transactions on Plasma Science . 2002,第5期

机译：在表面形貌上进行等离子成型：在RF高密度等离子中逐步模拟离子流，能量和角度分布
2. Plasma molding over surface topography: measurement of energy and angular distributions of ions extracted through a large hole [J] . Kim CK, Shin CB Thin Solid Films . 2005,第1a2期

机译：等离子成型在表面形貌上：测量通过大孔提取的离子的能量和角度分布
3. Ion energy and angular distributions in planar Ar/O-2 inductively coupled plasmas: hybrid simulation and experimental validation [J] . Zhang Yu-Ru, Zhao Zhuan-Zhuan, Xue Chan, Journal of Physics, D. Applied Physics: A Europhysics Journal . 2019,第29期

机译：平面AR / O-2电感耦合等离子体中的离子能量和角分布：混合仿真和实验验证
4. Energy distributions and angular distributions of pulsed plasmas based on vacuum surface flashover [C] . X. Wan, L. Chen, D. Z. Jin, International Symposium on Discharges and Electrical Insulation in Vacuum . 2016

机译：基于真空表面闪络的脉冲等离子体的能量分布和角度分布
5. A model of energy and angular distributions of fluxes to the substrate and resulting surface topology for plasma etching systems [D] . Hoekstra, Robert John 1998

机译：等离子蚀刻系统的通量能量和角分布的模型以及由此产生的表面拓扑
6. Plasma Membrane Sterol Distribution Resembles the Surface Topography of Living Cells [O] . Daniel Wüstner 2007

机译：血浆膜甾醇的分布类似于活细胞的表面形貌
7. Energy and Angular Distributions of Ions and Neutrals Extracted From a Slot in Contact With a High-Density Plasma [O] . Doosik Kim, Demetre J. Economou 2015

机译：从与高密度等离子体接触的槽中提取的离子和中性的能量和角分布
8. Scaling Parameters for Low Density Flowing Plasmas. Part I. Electron Beam Studies of the Gas-Surface Interaction Process. Part II [R] . de Leeuw, J. H., French, J. B. 1967

机译：低密度流动等离子体的缩放参数。第一部分气体 - 表面相互作用过程的电子束研究。第二部分

Plasma molding over surface topography: Simulation of ion flow, and energy and angular distributions over steps in rf high density plasmas

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