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Energy and Angular Distributions of Ions and Neutrals Extracted From a Slot in Contact With a High-Density Plasma

机译：从与高密度等离子体接触的槽中提取的离子和中性的能量和角分布

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Doosik Kim; Demetre J. Economou;
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年度 2015
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1. Plasma molding over surface topography: Simulation of ion flow, and energy and angular distributions over steps in RF high-density plasmas [J] . Doosik Kim, Economou D.J. IEEE Transactions on Plasma Science . 2002,第5期

机译：在表面形貌上进行等离子成型：在RF高密度等离子中逐步模拟离子流，能量和角度分布
2. Experimentally validated computations of simultaneous ion and fast neutral energy and angular distributions in a capacitively coupled plasma reactor [J] . Upadhyay Rochan R., Suzuki Kenta, Raja Laxminarayan L., Journal of Physics, D. Applied Physics: A Europhysics Journal . 2020,第43期

机译：在电容耦合等离子体反应器中的同时离子和快速中性能量和角度分布的实验验证计算
3. Plasma molding over surface topography: measurement of energy and angular distributions of ions extracted through a large hole [J] . Kim CK, Shin CB Thin Solid Films . 2005,第1a2期

机译：等离子成型在表面形貌上：测量通过大孔提取的离子的能量和角度分布
4. ENERGY AND ANGULAR DISTRIBUTION OF IONS EXTRACTED FROM A LARGE HOLE IN CONTACT WITH A HIGH DENSITY PLASMA [C] . Chang-Koo Kim, Demetre J. Economou International Symposia on Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Deposition II and Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing IV, 2001 . 2001

机译：与高密度等离子体接触的大孔中提取的离子的能量和角分布
5. A model of energy and angular distributions of fluxes to the substrate and resulting surface topology for plasma etching systems [D] . Hoekstra, Robert John 1998

机译：等离子蚀刻系统的通量能量和角分布的模型以及由此产生的表面拓扑
6. Generation of neutral and high-density electron–positron pair plasmas in the laboratory [O] . G. Sarri, K. Poder, J. M. Cole, -1

机译：在实验室中产生中性和高密度电子-正电子对等离子体
7. Plasma molding over surface topography: Simulation of ion flow, and energy and angular distributions over steps in rf high density plasmas [O] . Doosik Kim, Demetre J. Economou, J. R. Woodworth, 2003

机译：在表面形貌上的等离子体成型：在射频高密度等离子体中的步骤中模拟离子流，能量和角分布
8. Angular, Energy and Population Distributions of Neutral Atoms Desorbed by keV IonBeam Bombardment of Ni(001) [R] . He, C., Rosencrance, S. W., Postawa, Z., 1995

机译：KeV IonBeam轰击Ni（001）解吸的中性原子的角，能和群分布

Energy and Angular Distributions of Ions and Neutrals Extracted From a Slot in Contact With a High-Density Plasma

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