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Tuning Oxygen Concentration at Low and High Temperature IG Process and Boron Concentration in Epitaxial Wafer for the Gettering of Metal Impurities

机译：调节低温和高温下的氧浓度IG工艺和外延晶片中的硼浓度以吸收金属杂质

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Mohammad B. Shabani; Y. Shiina; Y. Shimanuki;
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1. Tuning Oxygen Concentration at Low and High Temperature IG Process and Boron Concentration in Epitaxial Wafer for the Gettering of Metal Impurities [J] . Mohammad B. Shabani, Y. Shiina, Y. Shimanuki Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2004,第0期

机译：调节低温和高温IG工艺中的氧气浓度以及外延晶片中的硼浓度以吸收金属杂质
2. Proximity gettering of C3H5 carbon cluster ion-implanted silicon wafers for CMOS image sensors: Gettering effects of transition metal, oxygen, and hydrogen impurities (vol 55, 121301,2016) [J] . Kurita Kazunari, Kadono Takeshi, Okuyama Ryousuke, Japanese journal of applied physics . 2017,第4期

机译：用于CMOS图像传感器的C3H5碳簇离子注入硅晶片的近乎吸杂：过渡金属，氧和氢杂质的吸杂效应（第55卷，121301,2016）
3. Proximity gettering of C3H5 carbon cluster ion-implanted silicon wafers for CMOS image sensors: Gettering effects of transition metal, oxygen, and hydrogen impurities [J] . Kurita Kazunari, Kadono Takeshi, Okuyama Ryousuke, Japanese journal of applied physics . 2016,第12期

机译：用于CMOS图像传感器的C3H5碳簇离子注入硅晶片的近乎吸杂：过渡金属，氧和氢杂质的吸杂作用
4. Tuning Oxygen Concentration at Low and High Temperature IG Process and Boron Concentration in Epitaxial Wafer for the Gettering of Metal Impurities [C] . Mohammad B. Shabani, Y. Shiina, Y. Shimanuki International autumn meeting on gettering and defect engineering in semiconductor technology . 2004

机译：在低温和高温IG工艺中调节氧浓度和外延晶片中的硼浓度，用于造成金属杂质的吸气
5. An investigation on the processing and characterization of (thallium(0.5 - x) lead(0.5 - x) europium(2x)) strontium(2 - y) barium(y) calcium(2) copper(3) oxygen(z) high-temperature superconductor to determine the optimum barium concentration and study the effects of doping europium in thallium and lead sites. [D] . Ju, Zifan. 1996

机译：th（0.5-x）铅（0.5-x）p（2 x））锶（2- y）钡（y）钙（2）铜（3）氧（z）高-温度超导体以确定最佳钡浓度，并研究and和铅位中掺杂euro的影响。
6. Human trophoblast survival at low oxygen concentrations requires metalloproteinase-mediated shedding of heparin-binding EGF-like growth factor [O] . D. Randall Armant, Brian A. Kilburn, Anelia Petkova, -1

机译：低氧浓度下人类滋养细胞的生存需要金属蛋白酶介导的结合肝素的EGF样生长因子的脱落
7. Neutral beam injector oxygen impurity measurements and concentration reduction via gettering processes [O] . R. J. Kane, W. L. Hsu, R. G. Kerr, 1985

机译：中性光束喷射器氧气杂质测量和通过吸收过程浓度降低
8. Neutral Beam Injector Oxygen Impurity Measurements and Concentration Reduction Via Gettering Processes [R] . Kane, R. J., Hsu, W. L., Kerr, R. G., 1984

机译：中性束注入器氧杂质测量和通过吸气过程减少浓度

Tuning Oxygen Concentration at Low and High Temperature IG Process and Boron Concentration in Epitaxial Wafer for the Gettering of Metal Impurities

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