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Enhance the Power Capability of TaN Thin Film Resistor by Improving Processes

机译：通过改进工艺提高TaN薄膜电阻器的功率容量

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Bin Wanga; Qian-tao Caob; Zhen-guo Songb;
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年度 2015
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1. Control of electrical resistivity of TaN thin films by reactive sputtering for embedded passive resistors [J] . S.M. Kang, S.G. Yoon, S.J. Suh, Thin Solid Films . 2008,第11期

机译：嵌入式无源电阻器的反应溅射控制TaN薄膜的电阻率
2. Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor Applications [J] . Huey-Ru Chen, Ying-Chung Chen, Ting-Chang Chang, Nanoscale Research Letters . 2016,第1期

机译：TaN薄膜电阻器上低温氮化技术在温度传感器中的作用机理
3. The Manipulation of Temperature Coefficient Resistance of TaN Thin-Film Resistor by Supercritical CO₂ Fluid [J] . Huey-Ru Chen, Ying-Chung Chen, Ting-Chang Chang, Electron Device Letters, IEEE . 2015,第3期

机译：超临界CO _{2 流体对TaN薄膜电阻温度系数的控制}
4. Design, Fabrication and Measurement of TaN Thin Film Resistor Based on MEMS Technology [C] . Tao-Tao Li, Liang Zhou, Wen-Yan Yin International Conference on Microwave and Millimeter Wave Technology . 2020

机译：基于MEMS技术的Tan薄膜电阻的设计，制造和测量
5. Plasmonics for Improved Thin-Film Photovoltaic Cells and Enhanced Light Extraction from Organic Light-Emitting Diodes. [D] . Chang, Chi-Sheng. 2015

机译：等离子技术可改善薄膜光伏电池并增强有机发光二极管的光提取能力。
6. Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor Applications [O] . Huey-Ru Chen, Ying-Chung Chen, Ting-Chang Chang, 2016

机译：TaN薄膜电阻器上低温氮化技术在温度传感器中的作用机理
7. Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor Applications [O] . 2016

机译：TaN薄膜电阻器上低温氮化技术在温度传感器中的作用机理
8. Thin-Film Electric Initiator: Iv. Mechanism of Low-Power Explosion of Thin-Film Resistors [R] . Clark, S. A. 1968

机译：薄膜电启动器：Iv。薄膜电阻器低功率爆炸机理

Enhance the Power Capability of TaN Thin Film Resistor by Improving Processes

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