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Bulk and Surface Passivation of Silicon Solar Cells Accomplished by Silicon Nitride Deposited on Industrial Scale by Microwave PECVD

机译：采用微波pECVD工业规模沉积氮化硅制备硅太阳能电池的体积和表面钝化

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Prog Photovolt; Henk Rieffe; Arthur Weeber;
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年度 2004
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1. Bulk and Surface Passivation of Silicon Solar Cells Accomplished by Silicon Nitride Deposited on Industrial Scale by Microwave PECVD [J] . W. SOPPE, H. RIEFFE, A. WEEBER Progress in photovoltaics . 2005,第7期

机译：微波PECVD工业规模沉积氮化硅完成的硅太阳能电池的体积和表面钝化
2. Efficient silicon nitride SiNx:H antireflective and passivation layers deposited by atmospheric pressure PECVD for silicon solar cells [J] . Lelièvre Jean‐Fran?ois, Kafle Bishal, Saint‐Cast Pierre, Progress in photovoltaics . 2019,第11期

机译：高效的氮化硅SINX：H抗反射和钝化层，用于硅太阳能电池的大气压PECVD沉积
3. Bulk Passivation of Multicrystalline Silicon Solar Cells Induced by High-rate-deposited (>1 nm/s) Silicon Nitride Films [J] . J. Hong, W. M. M. Kessels, F. J. H. van Assche Progress in photovoltaics . 2003,第2期

机译：高速沉积（> 1 nm / s）氮化硅膜引起的多晶硅太阳能电池的整体钝化
4. High-quality surface passivation of low-resistivity p-type C-Si by hydrogenated amorphous silicon nitride deposited by industrial-scale microwave PECVD [C] . Gupta S.D. Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE . 2011

机译：工业规模微波PECVD沉积的氢化非晶氮化硅对低电阻率p型C-Si的高质量表面钝化
5. Surface and bulk passivation of multicrystalline silicon solar cells by silicon nitride (hydrogen) layer: Modeling and experiments. [D] . Li, Chuan. 2009

机译：氮化硅（氢）层对多晶硅太阳能电池的表面和整体钝化：建模和实验。
6. Crystallization of amorphous silicon thin films deposited by PECVD on nickel-metalized porous silicon [O] . Sonia Ben Slama, Messaoud Hajji, Hatem Ezzaouia 2012

机译：通过PECVD在镍金属化多孔硅上沉积的非晶硅薄膜的结晶
7. Hydrogenated Amorphous Silicon Thin Films as Passivation Layers Deposited by Microwave Remote-PECVD for Heterojunction Solar Cells [O] . Min-Sung Jeon, Koichi Kamisako 2009

机译：氢化非晶硅薄膜作为钝化层，用于杂交偏光PECVD用于异质结太阳能电池
8. Effect of hydrogen-plasma and PECVD-nitride deposition on bulk and surface passivation in string-ribbon silicon solar cells [R] . Ruby, D. S. , Wilbanks, W. L. , Fleddermann, C. B. , 1995

机译：氢 - 等离子体和pECVD-氮化物沉积对线带硅太阳能电池中体积和表面钝化的影响

Bulk and Surface Passivation of Silicon Solar Cells Accomplished by Silicon Nitride Deposited on Industrial Scale by Microwave PECVD

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