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Dynamics and squeeze film gas damping of a capacitive RF MEMS switch

机译：电容式RF mEms开关的动态和挤压薄膜气体阻尼

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P. G. Steeneken; Th. G. S. M. Rijks; J. T. M. Van Beek; M. J. E. Ulenaers; J. De Coster; R. Puers;
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1. Dynamics and squeeze film gas damping of a capacitive RF MEMS switch [J] . Steeneken PG, Rijks TGSM, van Beek JTM, Journal of Micromechanics and Microengineering . 2005,第1期

机译：电容式RF MEMS开关的动态特性和压缩薄膜气体阻尼
2. Uncertainty in microscale gas damping: Implications on dynamics of capacitive MEMS switches [J] . Alina Alexeenko, Sruti Chigullapalli, Juan Zeng, Reliability Engineering & System Safety . 2011,第9期

机译：微型气体阻尼的不确定性：对电容式MEMS开关动力学的影响
3. Effect of environmental conditions and geometric parameters on the squeeze film damping in RF-MEMS switches [J] . Haider Syed Turab, Saleem Muhammad Mubasher, Ahmed Mashhood Analog Integrated Circuits and Signal Processing . 2019,第2期

机译：环境条件与几何参数对RF-MEMS开关中挤压膜阻尼的影响
4. Comprehensive Dynamic Model of a Viscously Damped RF-MEMS Switch Including Squeeze Film and Impact Force Effects [C] . Ameen H. EI-Sinawi, OmarA. Awad, Abdulaziz H. El-Sinawi International Conference on Mechatronic Systems and Materials Application . 2014

机译：综合动态模型的粘性射频开关，包括挤压膜和冲击力效应
5. Temperature dependence of viscoelasticity in thin gold films and its impact on the restoring force in RF MEMS capacitive switches. [D] . McLean, Mark J. 2010

机译：金薄膜中粘弹性的温度依赖性及其对RF MEMS电容开关中恢复力的影响。
6. A 5 g Inertial Micro-Switch with Enhanced Threshold Accuracy Using Squeeze-Film Damping [O] . Yingchun Peng, Guoguo Wu, Chunpeng Pan, 2018

机译：采用挤压膜阻尼的5 g惯性微动开关具有更高的阈值精度
7. Switching and release dynamics of an electrostatically actuated MEMS switch under the influence of squeeze-film damping [O] . Shekhar S, Vinoy KJ, Ananthasuresh GK 2012

机译：挤压膜阻尼作用下的静电驱动MEMS开关的开关和释放动力学
8. Alternative Dielectric Films for rf MEMS Capacitive Switches Deposited using Atomic Layer Deposited Al2O3/ZnO Alloys [R] . Herrman, C. F., DelRio, F. W., Miller, D. C., 2006

机译：用于射频mEms电容开关的替代介电薄膜，使用原子层沉积的al2O3 / ZnO合金沉积

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