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A common-path, multi-channel heterodyne laser interferometer for sub-nanometer surface metrology

机译：用于亚纳米表面测量的共路多通道外差激光干涉仪

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Feng Zhao; Jennifer E. Logan; Stuart Shaklan; Michael Shao;
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年度 1999
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专利

1. Full-field surface plasmon resonance sensor for high resolution refractive index measurement using common-path heterodyne interferometer [J] . Y.L. Lo, C.H. Chuang, Z.W. Lin Sensors and Actuators . 2011,第1期

机译：全场表面等离子体共振传感器，用于使用共径外差干涉仪测量高分辨率的折射率
2. Practical common-path heterodyne surface profiling interferometer with automatic focusing [J] . Zhao HZ., Li DC., Cao M., Optics & Laser Technology . 2001,第4期

机译：具有自动聚焦功能的实用共径外差表面轮廓干涉仪
3. Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations [J] . Kimmo Kokkonen, Matti Kaivola Applied Physics Letters . 2008,第6期

机译：扫描外差激光干涉仪，用于表面振动的相敏绝对振幅测量
4. Common-path multichannel heterodyne laser interferometer for subnanometer surface metrology [C] . Feng Zhao, Jet Propulsion Lab., Pasadena, Optical Engineering for Sensing and Nanotechnology (ICOSN '99) . 1999

机译：用于亚纳米表面计量的共径多通道外差激光干涉仪
5. Compressive imaging and dual moire laser interferometer as metrology tools. [D] . Abolbashari, Mehrdad. 2013

机译：压缩成像和双莫尔激光干涉仪作为计量工具。
6. Design for a Highly Stable Laser Source Based on the Error Model of High-Speed High-Resolution Heterodyne Interferometers [O] . Hongxing Yang, Ziqi Yin, Ruitao Yang, 2020

机译：基于高速高分辨率外差式干涉仪误差模型的高稳定激光源设计
7. A Common-Path Heterodyne Interferometer for Surface Profiling in Microelectronic Fabrication [O] . Klein Eric J., Ramirez Fred, Hall John L. 2001

机译：用于微电子制造中表面轮廓分析的共通路径外差式干涉仪
8. A Common-path, Multi-channel Heterodyne Laser Interferometer for Sub-nanometer Surface Metrology [R] . Zhao, F., Logan, J., Shaklan, S., 1999

机译：用于亚纳米表面计量的共通道，多通道外差激光干涉仪

A common-path, multi-channel heterodyne laser interferometer for sub-nanometer surface metrology

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