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Implant Metrology for Bonded SOI Wafers Using a Surface Photo-Voltage Technique

机译：使用表面光电压技术的粘合sOI晶片的植入计量

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Adam Bertucha; Wesley Smitha; Ken Steeplesa; Robert St; Anca Stefanescub; Ron Johnsonc;
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1. Double-SOI Wafer-Bonded CMUTs With Improved Electrical Safety and Minimal Roughness of Dielectric and Electrode Surfaces [J] . Zhang P. Microelectromechanical Systems, Journal of . 2012,第3期

机译：具有电气安全性和介电和电极表面粗糙度最小的双SOI晶片键合CMUT
2. Surface blistering of low-temperature annealed hydrogen and helium co-implanted silicon and its application to splitting of bonded wafer substrates [J] . Hurley RE, Wadsworth H, Gamble HS Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2007,第10期

机译：低温退火氢和氦共注入硅的表面起泡及其在键合晶片衬底分裂中的应用
3. Low-threshold proton-implanted 1.3-/spl mu/m vertical-cavity top-surface-emitting lasers with dielectric and wafer-bonded GaAs-AlAs Bragg mirrors [J] . Qian Y., Zhu Z.H. IEEE Photonics Technology Letters . 1997,第7期

机译：低阈值质子注入的1.3- / splμm/ m垂直腔顶表面发射激光器，带有电介质和与晶片结合的GaAs-AlAs布拉格镜
4. Implant Metrology for Bonded SOI Wafers Using a Surface Photo-Voltage Technique [C] . Adam Bertuch, Wesley Smith, Ken Steeples, Electrochemical Society(ECS) Meeting;International Symposium on Silicon-on-Insulator Technology and Devices; 20070506-11;20070506-11; Chicago,IL(US);Chicago,IL(US) . 2007

机译：使用表面光电压技术的键合SOI晶圆的植入物计量学
5. The Effect of Offcut Angle on Electrical Conductivity of Direct Wafer-Bonded n-Gallium Arsenide/n-Gallium Arsenide Structures for Wafer-Bonded Tandem Solar Cells [D] . Yeung, King Wah Sunny 2012

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机译：通过使用自掩膜蚀刻技术在晶圆表面形成纳米级金字塔提高多晶硅晶圆太阳能电池效率
7. Dopant Dose Metrology for Ultra-Shallow Implanted Wafers using Electron-Induced X-Ray Spectrometry at Pattern-Size Scale [O] . Pierre-F. Staub 2005

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8. Wafer-Bonded, Floating Element Shear-Stress Sensor Using a Geometric Moire Optical Transduction Technique [R] . Horowitz, S. , Chen, T. , Chandrasekaran, V. , 2007

机译：采用几何莫尔光学传导技术的晶圆键合浮动元件剪应力传感器

Implant Metrology for Bonded SOI Wafers Using a Surface Photo-Voltage Technique

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