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Effect of quartz window temperature on plasma composition during STI etch

机译：石英窗口温度对sTI蚀刻过程中等离子体组成的影响

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E. V. Danilkin; D. Shamiryan; M. R. Baklanov; A. P. Milenin; W. Boullart; G. Y. Krasnikov;
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年度 2015
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2. Temperature dependence of the transmission loss in KU-1 and KS-4V quartz glasses for the ITER diagnostic window [J] . T. Nishitani, T. Sugie, N. Morishita, Fusion Engineering and Design . 2005,第1a4期

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4. Effect of quartz window temperature on plasma composition during STI etch [C] . E.V. Danilkin, D. Shamiryan, M.R. Baklanov, SPIE Conference on Micro- and Nanoelectronics . 2008

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Effect of quartz window temperature on plasma composition during STI etch

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