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An Investigation of Phenomenal Parasitics and Robust Control of Parallel-Plate Electrostatic Micro Actuators

机译：平行板静电微执行器的现象寄生和鲁棒控制研究

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Guchuan Zhua; Mehran Hosseinib; Yves-alain Peterb;
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年度 2015
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1. Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation [J] . Weinberger Stefan, Tran Trung Nguyen, Lecomte Romeo, Microsystem technologies . 2016,第2期

机译：带静电平行板驱动的单轴微镜的线性化控制
2. A new formulation of fringing capacitance and its application to the control of parallel-plate electrostatic micro actuators [J] . Mehran Hosseini, Guchuan Zhu, Yves-Alain Peter Analog Integrated Circuits and Signal Processing . 2007,第2a3期

机译：边缘电容的新公式及其在平行板静电微执行器控制中的应用
3. A new formulation of fringing capacitance and its application to the control of parallel-plate electrostatic micro actuators [J] . Mehran Hosseini, Guchuan Zhu, Yves-Alain Peter Analog Integrated Circuits and Signal Processing . 2007,第2a3期

机译：边缘电容的新公式及其在平行板静电微执行器控制中的应用
4. An Investigation of Phenomenal Parasitics and Robust Control of Parallel-Plate Electrostatic Micro Actuators [C] . Guchuan Zhu, Jean-Francois Chianetta, Mehran Hosseini, Optomechatronic Actuators, Manipulation, and Systems Control; Proceedings of SPIE-The International Society for Optical Engineering; vol.6374 . 2006

机译：平板静电微执行器的现象寄生性和鲁棒控制研究
5. Control of MEMS electrostatic parallel-plate actuators. [D] . Guillou, David Francois. 2001

机译：MEMS静电平行板致动器的控制。
6. Influence of Damping on the Dynamical Behavior of the Electrostatic Parallel-plate and Torsional Actuators with Intermolecular Forces [O] . Wen-Hui Lin, Ya-Pu Zhao 2007

机译：阻尼对带分子间力的静电平行板和扭转执行器动力学行为的影响
7. Nonlinear control techniques for micro electrostatic actuators in the presence of parasitics and parametric uncertainties [O] . Salah Mohammed H., Al-Jarrah Ahmad M., Tatlıcıoğlu Enver 2011

机译：存在寄生和参数不确定性的微静电执行器的非线性控制技术
8. Segmented Control of Electrostatically Actuated Bimorph Micromirrors. [R] . Waggoner, K. W. 2018

机译：静电驱动双晶片微镜的分段控制。

An Investigation of Phenomenal Parasitics and Robust Control of Parallel-Plate Electrostatic Micro Actuators

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