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A 3-DOF PIEZOELECTRIC MICRO VIBRATORY STAGE BASED ON BULK-PZT/SILICON CRAB-LEG SUSPENSIONS

机译：基于BULK-pZT / sILaBON CRaB-LEG悬架的三自由度压电微振动阶段

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Ethem Erkan Aktakka; Rebecca L. Peterson; Khalil Najafi;
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1. Fabrication of a piezoelectrically driven micropositioning 3-DOF stage with elastic body using a multi-material 3D printer [J] . Baek Sang-Woo, Cho Nahm-Gyoo, Lee Dong-Hyeok Rapid prototyping journal . 2020,第9期

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2. Multi-Axis Inertial Energy Harvester Based on Piezoelectric Crab-Legs with Partitioned Electrodes [J] . E E Aktakka, K Najafi Journal of Physics: Conference Series . 2016,第1期

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3. Micro-motion detection of the 3-DOF precision positioning stage based on iterative optimized template matching [J] . Li Hai, Zhang Xianmin, Zhu Benliang, Applied optics . 2017,第34期

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4. A 3-DOF piezoelectric micro vibratory stage based on bulk-PZT/silicon crab-leg suspensions [C] . Aktakka Ethem Erkan, Peterson Rebecca L., Najafi Khalil IEEE International Conference on Micro Electro Mechanical Systems . 2013

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5. Degree-per-hour mode-matched micromachined silicon vibratory gyroscopes. [D] . Zaman, Mohammad Faisal. 2008

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7. Novel Type of Hybrid 3-DOF Micromanipulator with Piezoelectric Actuators – Mechanical Construction and Simulations [O] . Prusak Daniel, Uhl Tadeusz 2015

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A 3-DOF PIEZOELECTRIC MICRO VIBRATORY STAGE BASED ON BULK-PZT/SILICON CRAB-LEG SUSPENSIONS

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