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The Effect of PVA Brush Scrubbing on Post CMP Cleaning Process for Damascene Cu Interconnection

机译：pVa刷洗涤对大马士革铜互连Cmp后清洗工艺的影响

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Hanchul Cho; Youngmin Kim; Hyunseop Lee; Sukbae Joo; Haedo Jeong;
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1. The Effect of PVA Brush Scrubbing on Post CMP Cleaning Process for Damascene Cu Interconnection [J] . Hanchul Cho, Youngmin Kim, Hyunseop Lee, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2009,第0期

机译：PVA刷擦洗对镶嵌Cu互连后CMP清洁过程的影响
2. The Effect of PVA Brush Scrubbing on Post CMP Cleaning Process forDamascene Cu Interconnection [J] . Hanchul Cho, Youngmin Kim, Hyunseop Lee, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2009,第Null期

机译：PVA刷洗对镶嵌铜互连的CMP后清洁工艺的影响
3. Investigation of eccentric PVA brush behaviors in post-Cu CMP cleaning [J] . T. Sun, Y. Zhuang, W. Li, Microelectronic Engineering . 2012,第Deca期

机译：Cu-Cu CMP清洗中偏心PVA刷行为的研究
4. The Effect of PVA Brush Scrubbing on Post CMP Cleaning Process for Damascene Cu Interconnection [C] . Hanchul Cho, Youngmin Kim, Hyunseop Lee, International Symposium on Ultra Clean Processing of Semiconductor Surfaces . 2009

机译：PVA刷擦洗对镶嵌Cu互连后CMP清洁过程的影响
5. Development of Formulations for a-SiC and Manganese CMP and Post-CMP Cleaning of Cobalt. [D] . Lagudu, Uma Rames Krishna. 2014

机译：开发用于a-SiC和锰CMP的配方以及CMP后的钴清洗。
6. Cu Nanoparticles in Hydrogels of Chitosan-PVA Affects the Characteristics of Post-Harvest and Bioactive Compounds of Jalapeño Pepper [O] . Zeus H. Pinedo-Guerrero, Alma Delia Hernández-Fuentes, Hortensia Ortega-Ortiz, 2017

机译：壳聚糖-PVA水凝胶中的铜纳米颗粒影响墨西哥胡椒辣椒收获后和生物活性化合物的特性
7. Effect of Various Cleaning Solutions and Brush Scrubber Kinematics on the Frictional Attributes of Post Copper CMP Cleaning Process [O] . Yasa Sampurno, Yun Zhuang, Xun Gu, 2015

机译：不同清洗液和刷洗机运动学对后铜Cmp清洗过程摩擦性能的影响

The Effect of PVA Brush Scrubbing on Post CMP Cleaning Process for Damascene Cu Interconnection

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