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Linearization of electrostatically actuated surface micromachined 2-D optical scanner

机译：静电驱动的表面微机械二维光学扫描仪的线性化

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Hiroshi Toshiyoshi; Wibool Piyawattanametha; Cheng-ta Chan; Ming C. Wu;
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年度 2001
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1. Micromachined 2-D scanner for 3-D optical coherence tomography [J] . Yeow JTW, Yang VXD, Chahwan A, Sensors and Actuators, A. Physical . 2005,第2期

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2. Integrated Optical Displacement Detection and Electrostatic Actuation for Directional Optical Microphones With Micromachined Biomimetic Diaphragms [J] . Bicen B., Jolly S., Jeelani K., Sensors Journal, IEEE . 2009,第12期

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3. Surface- and Bulk- Micromachined Two-Dimensional Scanner Driven by Angular Vertical Comb Actuators [J] . Wibool Piyawattanametha, Pamela R. Patterson, Dooyoung Hah, Journal of Microelectromechanical Systems . 2005,第6期

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4. Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners [C] . Meng-Hsiung Kiang, Solgaard, O. . 1996

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5. Surface and bulk micromachined two dimensional angular vertical comb actuators scanner for endoscopic ultrahigh resolution optical coherence tomography imaging [D] . Piyawattanametha, Wibool 2004

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6. Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation [O] . Neal A. Hall, Murat Okandan, Robert Littrell, -1

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7. Application of a Multilayered Magnetostrictive Film to a Micromachined 2-D Optical Scanner [O] . A. Debray, A. Ludwig, T. Bourouina, 2004

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8. Computation of Static Shapes and Voltages for Micromachined Deformable Mirrors with Nonlinear Electostatic Actuators [R] . Wang, P. K. C., Hadaegh, F. Y. 1996

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Linearization of electrostatically actuated surface micromachined 2-D optical scanner

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