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Self-Consistent Modeling of Nonlocal Inductively Coupled Plasmas

机译：非局部电感耦合等离子体的自洽建模

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Oleg V. Polomarov; Constantine E. Theodosiou; Igor D. Kaganovich; Demetre J. Economou; Badri N. Ramamurthi;
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1. Self-consistent modeling of nonlocal inductively coupled plasmas [J] . Polomarov O.V., Theodosiou C.E., Kaganovich I.D., IEEE Transactions on Plasma Science . 2006,第3期

机译：非局部感应耦合等离子体的自洽建模
2. Fully Self-Consistent 3-D Modeling of Inductively Coupled Plasmas [J] . Agarwal A., Kenney J.A., Rauf S., Plasma Science, IEEE Transactions on . 2014,第10期

机译：电感耦合等离子体的完全自洽3-D建模
3. Self-Consistent Particle Modeling of Inductively Coupled CF_4 Plasmas: Effect of Wafer Biasing [J] . Hideto TAKEKIDA, Kenichi NANBU Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2006,第3A期

机译：感应耦合CF_4等离子体的自洽粒子建模：晶圆偏置的影响
4. ENHANCED NONLOCAL MODELING OP HIGH-DENSITY INDUCTIVELY COUPLED PLASMAS [C] . U. Kortshagen International symposium on plasma chemistry . 1997

机译：增强的非局部建模OP高密度电感耦合等离子体
5. Self-consistent multidimensional electron kinetic model for inductively coupled plasma sources. [D] . Dai, Fa Foster. 1997

机译：电感耦合等离子体源的自洽多维电子动力学模型。
6. Accurate Measurement of Copper Overload in an Experimental Model of Wilson Disease by Laser Ablation Inductively Coupled Plasma Mass Spectrometry [O] . Philipp Kim, Chengcheng Christine Zhang, Sven Thoröe-Boveleth, 2020

机译：激光烧蚀电感耦合等离子体质谱法精确测量威尔逊病的实验模型中的铜过载
7. Deuterium analysis by inductively coupled plasma mass spectrometry using polyatomic species: An experimental study supported by plasma chemistry modeling [O] . Gábor Galbács, Albert Kéri, Ildikó Kálomista, 2020

机译：氘分析电感耦合等离子体质谱法使用多原子物种：血浆化学建模支持的实验研究

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