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A study of a Silicon Carbide Capacitive Pressure Sensor Applied in Harsh Environment

机译：应用于恶劣环境的碳化硅电容式压力传感器的研究

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Hao Jie Lv; Hui Yong Yu; Jiang Hua Hou; Tao Geng;
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年度 2016
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1. Comparison study of ohmic contacts to 4H-silicon carbide in oxidizing ambient for harsh environment gas sensor applications [J] . Sang-Kwon Lee, Eun-Kyung Suh, Nam-Kyu Cho, Solid-State Electronics . 2005,第8期

机译：在恶劣环境气体传感器应用中氧化环境中与4H碳化硅的欧姆接触的比较研究
2. A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement [J] . Chen L, Mehregany M Sensors and Actuators, A. Physical . 2008,第0期

机译：用于缸内压力测量的碳化硅电容式压力传感器
3. A silicon carbide capacitive pressure sensor for in-cylinder pressure measurement [J] . Chen L, Mehregany M Sensors and Actuators, A. Physical . 2008,第Null期

机译：用于缸内压力测量的碳化硅电容式压力传感器
4. A study of a Silicon Carbide Capacitive Pressure Sensor Applied in Harsh Environment [C] . Hao Jie Lv, Hui Yong Yu, Jiang Hua Hou, International Conference on Measurement, Instrumentation and Automation . 2013

机译：苛刻环境中施加碳化硅电容压力传感器的研究
5. Poly-crystalline silicon carbide passivated capacitive MEMS strain gauge for harsh environments. [D] . Jamshidi, Babak. 2008

机译：多晶硅碳化硅钝化电容式MEMS应变仪，适用于恶劣环境。
6. Extending Porous Silicone Capacitive Pressure Sensor Applications into Athletic and Physiological Monitoring [O] . Yun Xia, Hao Gu, Lei Xu, 2021

机译：将多孔有机硅电容压力传感器应用延伸到运动和生理监测中
7. Pressure Sensor Interface Circuit Based on Silicon Carbide Electronics for Harsh Environment Operation [O] . Joseph Riad, Mourad El-Gamal, Hani Ragai 2014

机译：基于碳化硅电子器件的压力传感器接口电路，用于苛刻环境运行
8. Silicon Carbide Sensors and Electronics for Harsh Environment Applications [R] . Evans, Laura J. 2007

机译：适用于恶劣环境应用的碳化硅传感器和电子设备

A study of a Silicon Carbide Capacitive Pressure Sensor Applied in Harsh Environment

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